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EISSN: 2313-3724, Print ISSN:2313-626X

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 Volume 5, Issue 2 (February 2018), Pages: 44-55


 Original Research Paper

 Title: Intuitive dispatching method to handle the 450 mm wafer and prioritize jobs in a conveyor of semiconductor industry

 Author(s): Thanh-Tuyen Tran *


 Scientific Research Office, Lac Hong University, Bien Hoa city, Dong Nai, Vietnam

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An effective material handling system can help factories meet the transportation demands for new wafer size since the size increases from 300 mm to 450 mm. With advantages proved, conveyor-based automated materials handling system (AMHS) is chosen as the next generation transport system. However, this transport system also faces with the problems about traffic jams when having so much lot in loop and loading or unloading procedures. Besides, a higher priority lots should enjoy greater transportation privileges than those with a lower priority. Thus, one good dispatching rule is very helpful for an AMHS. This research proposes restructuring loop configurations for conveyor-based AMHS and develops an effective dispatching rule, named rota-caster in heuristic preemptive dispatching method (R-HPD). Simulation results demonstrate that the R-HDP can provide better performances than the best existed method (DPD). The R-HPD rule reduces the average delivery time by 49.4% for hot lots and 50.5% for normal lots. Moreover, the average delivery time of normal lot is not affected so much when bay loading and hot lot ratio increase. 

 © 2017 The Authors. Published by IASE.

 This is an open access article under the CC BY-NC-ND license (

 Keywords: AMHS, Conveyor-based, 450 mm wafer fabrication, Preemptive

 Article History: Received 22 September 2017, Received in revised form 2 December 2017, Accepted 10 December 2017

 Digital Object Identifier:


 Tran TT (2018). Intuitive dispatching method to handle the 450 mm wafer and prioritize jobs in a conveyor of semiconductor industry. International Journal of Advanced and Applied Sciences, 5(2): 44-55

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